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A Practical Guide to Optical Metrology for Thin Films By Michael Quinten
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Review
“A one-stop, concise guide on determining and measuring thin film thickness by optical methods.” (The German Branch of the European Optical Society, 1 November 2013)
“It would be a useful read for industrial and academic researchers, engineers, developers and manufacturers in areas of optical layer and thin optical film measurement and metrology.” (Optics & Photonics News, 1 November 2013) From the Back Cover
This book presents a comprehensive overview of optical metrology for thin film thickness determination by optical means, from electrodynamic basics, and hardware components, to methods of measurement and evaluation. The author, an expert in the field with both academic and industrial experience, concentrates on the spectral reflectance measurement with miniaturized spectrometers, one of the most flexible techniques for inline and offline thickness determination.
About the Author
Dr. Michael Quinten works as Head of Research and Development Sensors at FRT GmbH in Bergisch Gladbach, Germany. Having obtained his diploma degree and Ph. D. in physics (1989) at the University of Saarland, Saarbruecken, Germany, he joined the Technical University RWTH Aachen in 1990 to work as a physics fessor. He then spent four years at several universities in Graz (Austria), Chemnitz, Aachen, Saarbruecken and Bochum (Germany). During his academic career, he authored 50 scientific publications on optical properties of nanoparticles, nanoparticle materials, and aerosols. In 2001, he joined the ETA-Optik GmbH, Germany, where he first worked in research and development of integrated optics components, and later became a product manager in the Colour and Coatings Division. During this period, he became expert in optical layer thickness determination. In 2007, he moved to FRT GmbH where he is responsible for the optical sensor technology division. He is the author of Optical Properties of Nanoparticle Systems: Mie and Beyond, Hardcover, 502 pages, Publisher: Wiley-VCH; 1 edition (March 15, 2011), ISBN10: 9783527410439, ISBN-13: 978-3527410439.
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